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AL ALLOY FILM FOR DISPLAY, DISPLAY AND SPUTTERING TARGET 发明申请

2023-07-19 2710 1578K 0

专利信息

申请日期 2025-07-19 申请号 JP2009254359
公开(公告)号 JP2010134458A 公开(公告)日 2010-06-17
公开国别 JP 申请人省市代码 全国
申请人 KOBE STEEL LTD
简介 PROBLEM TO BE SOLVED : To provide an Al alloy film for a display, which sufficiently and surely exhibits low contact resistance, even when it is directly connected to a transparent pixel electrode by eliminating a barrier metal layer. SOLUTION : Disclosed is an Al alloy film which is directly connected to a transparent conductive film on a substrate of the display. The Al alloy film contains 0.05 to 1.0 atom% of Ge, 0.03 to 2.0 atom% of at least one element selected from among an element group (Ni, Ag, Co and Zn), and 0.05 to 0.5 atom% of at least one element selected from among an element group consisting of rare earth elements. More than 50 Ge-containing deposit particles per 100 μm2 with a long diameter of 20 nm or more, are present in the Al alloy film for a display. COPYRIGHT : (C)2010, JPO&INPIT


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