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CERAMIC SUBSTRATE AND ELECTRONIC DEVICE

2025-06-17 23:474720下载
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There are provided a ceramic substrate and so on including : a silicon nitride crystal phase containing a plurality of silicon nitride crystals, and grain boundaries between the silicon nitride crystals; and a silicate phase containing magnesium silicate crystals and rare earth silicate crystals, respective maximum particle sizes of the magnesium silicate crystals and the rare earth silicate crystals being smaller than that of the silicon nitride crystals, the silicate phase being positioned in the grain boundaries.


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