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A circuit yield analysis method for evaluating rare failure events includes the steps of : performing initial sampling for detecting failed samples located in one or more failure regions within a multi-dimensional parametric space, respectively; generating a distribution of the failed samples with discrete values along each dimension; classifying the failed samples; performing transform for projecting the failed sampled to all dimensions of a transform space; and classifying the type of the failure region for each dimension of the parametric space. Accordingly, the present invention can reduce an evaluation time for importance sampling.COPYRIGHT KIPO 2018