用於射频滤波器应用的磊晶 AlN/cREO 结构

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A layer structure comprising a semiconductor layer, a first rare earth oxide layer over the semiconductor layer, wherein the first rare earth oxide layer includes a first discrete portion and a second discrete portion, a metal layer epitaxially grown over the first rare earth oxide layer, wherein the metal layer includes a metal portion that overlaps a first region of the first discrete portion and a second region of the second discrete portion, and a III-N layer epitaxially grown over the metal layer, wherein the III-N layer is a crystalline piezoelectric layer.