RARE EARTH OXIDE BASED CORROSION RESISTANT COATING FOR SEMICONDUCTOR APPLICATION

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PROBLEM TO BE SOLVED : To provide a coating material resistant in plasma and used for a semiconductor manufacturing chamber. SOLUTION : An article includes a body coated with a ceramic coating. The ceramic coating includes Y2O3 of approximately 45 mol % to approximately 99 mol%, ZrO2 of approximately 0 mol% to approximately 55 mol% and Al2O3 of approximately 0 mol% to approximately 10 mol% and can alternatively include Y2O3 of approximately 30 mol% to approximately 60 mol%, ZrO2 of approximately 0 mol% to approximately 20 mol% and Al2O3 of approximately 30 mol% to approximately 60 mol%. The ceramic coating is preferably performed by a ceramic coater 104 including a plasma spray apparatus. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2018, JPO&INPIT