RARE EARTH THIN FILM MAGNET AND MANUFACTURING METHOD THEREOF

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PROBLEM TO BE SOLVED : To provide a manufacturing method of a rare earth thin film magnet having good magnetic characteristics without peeling of a film or destruction of the substrate.SOLUTION : A rare earth thin film magnet made of Nd-Fe-B formed on a glass film on a Si substrate includes a step of forming a glass film having a film thickness of 20 μm or more on a Si substrate by a pulsed laser deposition method, a step of forming an Nd-Fe-B rare earth thin film to a film thickness of 10 μm or more, a step of crystallizing the formed rare earth thin film by heat treatment, and a step of magnetizing the crystallized rare earth thin film to prepare a rare earth thin film magnet.SELECTED DRAWING : Figure 2COPYRIGHT : (C)2019, JPO&INPIT