文件类型：PDF文档
文件大小：92K
SOLUTION : A thermal spray member comprises a base material having a spray coating and the spray coating including one kind or two kinds or more of rare earth acid fluorides selected from Re5O4F7, Re6O5F8 and Re7O6F9 (Re represents a rare earth element) as a main phase. EFFECT : The use of suspension plasma spray slurry can stably form a spray coating including rare earth acid fluoride reducing generation of a process shift and particles on a base material in an atmosphere including gas containing oxygen by suspension plasma spray. The thermal spray member including the spray coating is excellent in corrosion resistance to halogen based gas plasma. SELECTED DRAWING : None COPYRIGHT : (C)2018, JPO&INPIT