YTTRIUM ALUMINUM SILICATE GLASS CERAMIC COATING FOR SEMICONDUCTOR CHAMBER APPARATUS

文件类型：PDF文档
文件大小：3142K
Articles may be protected against halide plasma, by applying a rare earth-containing glaze to the surface of the article. The glaze may be a coating comprising; 20 to 90 mol% SiO2, 0 to 60 mol% Al2O3, 10 to 80 mol% rare earth oxides and/or rare earth fluorides (REX), wherein SiO2+ Al2O3+REX ≥60 mol%.