RARE EARTH ELEMENT OXYFLUORIDE POWDER THERMAL SPRAY MATERIAL AND RARE EARTH ELEMENT OXYFLUORIDE THER

文件类型：PDF文档
文件大小：102K
SOLUTION : The rare earth element oxyfluoride powder thermal spray material consists of a powder including oxyfluoride of one or more than two kinds of rare earth elements selected from 3A group elements from La to Lu, has 2 or less of an aspect ratio of the shape of particle, 10 μm or more and 100 μm or less of an average particle size (D50 of mass reference) and 0.8 g/cm3 or more and 2 g/cm3 or less of a bulk density and includes 0.5 mass% or less of carbon and 3 mass% or more and 15 mass% or less of oxygen. EFFECT : The rare earth element fluoride thermal sprayed member manufactured using the rare earth element oxyfluoride powder thermal spray material suitable for plasma spray in the atmosphere has excellent corrosion resistance to plasma etching and can achieve a longer life as compared to a member obtained by forming a thermal spray coating formed of a rare earth oxide or a rare earth fluoride when used as a plasma resistance member in a halogen gas. SELECTED DRAWING : None COPYRIGHT : (C)2018, JPO&INPIT