RARE-EARTH THIN-FILM MAGNET AND PRODUCTION PROCESS THEREFOR

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A rare-earth thin-film magnet which includes Nd, Fe, and B as essential components, characterized by including an Si base having an oxide film present on a surface thereof, an Nd underlying film formed as a first layer over the Si base, and an Nd-Fe-B film formed as a second layer on the first layer. A purpose of the present invention is to provide a rare-earth thin-film magnet and a production process therefor, the rare-earth thin-film magnet suffering neither film separation nor base fracture and having satisfactory magnetic properties even when the second layer has a composition in the range of 0.120≤Nd/(Nd+Fe)<0.150, which corresponds to a composition range near to the stoichiometric composition.