Manufacturing method of Electrostatic chuck

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According to one embodiment of the present invention, disclosed is an electrostatic chuck of which at least a portion is made of an aluminum nitride sintered body. The aluminum nitride sintered body comprises : aluminum nitride; and a composite oxide containing two kinds of rear-earth metal. The aluminum nitride sintered body comprises 0.2-20 wt% of the composite oxide. The electrostatic chuck has reduced volume resistivity.(AA) Start(BB) End(S10) Preparing aluminum nitride powder(S20) Preparing composite oxide powder(S30) Forming a mixed powder by mixing the aluminum nitride powder and the composite oxide powder(S40) Primarily pressure forming the mixed powder to produce a preform(S50) Secondarily pressure forming and sintering the preformCOPYRIGHT KIPO 2017