SEMICONDUCTOR GAS SENSOR, MANUFACTURING METHOD THEREFOR, AND SENSOR NETWORK SYSTEM

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PROBLEM TO BE SOLVED : To provide a semiconductor gas sensor that offers improved CO2 gas selectability, a manufacturing method for the same, and a sensor network system. SOLUTION : A CO2 gas sensor of the present invention is a semiconductor gas sensor designed to detect CO2 gas and includes; a gas-sensitive material 30 comprising SnO231 having a surface thereof coated with a thin film 32 of a rare-earth oxide; a pair of positive and negative electrodes 28L, 28R formed to be in tight contact with the gas-sensitive material 30; and a micro heater MH for heating the gas-sensitive material 30. SELECTED DRAWING : Figure 3 COPYRIGHT : (C)2017, JPO&INPIT