SEMICONDUCTOR TYPE GAS SENSOR, METHOD OF MANUFACTURING SEMICONDUCTOR TYPE GAS SENSOR, AND SENSOR N

文件类型：PDF文档
文件大小：1275K
A semiconductor type gas sensor for detecting a CO2 gas includes : a gas-sensitive body in which a surface of a tin oxide is coated with a thin film of a rare earth oxide; a pair of positive and negative electrodes tightly formed on the gas-sensitive body; and a micro-heater configured to heat the gas-sensitive body.