RARE EARTH OXIDE-BASED CORROSION RESISTANT COATING FOR SEMICONDUCTOR APPLICATION

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PROBLEM TO BE SOLVED : To provide a manufacturing method of an article containing a body coated by ceramic coating. SOLUTION : There is provided a manufacturing method of an article including a process 210 for coating at least one surface of a body, where the body contains at least one of ceramic or aluminum, copper, magnesium, ceramic coating contains Y2O3 in a range of about 45 to about 99 mol%, ZrO2 in a range of about 0 to about 55, Al2O3 in a range of about 0 to about 10 mol% or the ceramic coating alternatively contains Y2O3 in a range of about 30 o about 60 mol%, ZrO2 in a range of about 0 to about 20 and Al2O3 in a range of about 30 to about 60 mol%. There is provided a method including a process for conducting ceramic coating on at least one surface of the body by plasma spray, where the coating has thickness of about 5 to about 25 mill. SELECTED DRAWING : Figure 2 COPYRIGHT : (C)2017, JPO&INPIT