RARE-EARTH MAGNET, AND MAGNETRON SPUTTER DEVICE USING THE MAGNET

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PROBLEM TO BE SOLVED : To provide a rare-earth magnet superior in corrosion resistance to the prior art, and a magnetron sputter device using the magnet.SOLUTION : A rare-earth magnet arranged for use in water is characterized by having a modified epoxy resin coating sheet on the face to contact with water. The corrosion resistance can be further improved by making the modified epoxy resin coating sheet of a weak solvent type high-solid modification epoxy resin paint, and/or by setting the thickness of the modified epoxy resin coating sheet to 100 μm to 1000 μm.SELECTED DRAWING : Figure 1COPYRIGHT : (C)2017, JPO&INPIT