Method for Producing Plasma-Resistant Coating Layer

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The method of producing a surface-resistant coating film according to the present invention (1) a first rare earth metal compound powder comprising a 90 ~ 99.9 wt% first rare earth metal compound particles and 0.1 to 10 wt% silica (SiO 2) particles on the coating object forming a lower coating layer through a thermal spraying process; (2) the surface processing to have an average surface base having a surface surface surface of the first rare earth metal compound coating layer formed in step 1 to 6 μm; And (3) by including the step of forming the upper coating layer through a suspension plasma spraying process of the second rare earth metal compound particles on the first rare earth metal compound coating layer in which the processing of the step is performed