MANUFACTURING METHOD OF HIGH FILLING SPHERICAL ALUMINUM NITRIDE FILLER

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PROBLEM TO BE SOLVED : To provide a spherical aluminum nitride filler having enhanced filling property. SOLUTION : Fusion of spherical aluminum nitride granules each other can be suppressed by mixing the spherical aluminum nitride granules with boron nitride powder when the spherical aluminum nitride granules containing rare earth oxide is heat treated at 1700 to 1900°C under nitrogen atmosphere. Filling property can be enhanced by controlling added amount of the used boron nitride powder to 0.2 pts.wt. or more and less than 1 pts.wt. based on 100 pts.wt. of the spherical aluminum nitride granules at that time. Also a high filling spherical aluminum nitride filler can be obtained by inputting only the spherical aluminum nitride granules and the boron nitride powder into a vessel rotary type mixer, mixing them and suppressing breakage of an aluminum nitride particle. SELECTED DRAWING : None COPYRIGHT : (C)2017, JPO&INPIT