CERAMICS MATERIAL, METHOD FOR MANUFACTURING THE SAME, AND MEMBER FOR SEMICONDUCTOR MANUFACTURING A

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The present invention relates to a material for ceramics, a production method thereof, and a member for semiconductor production apparatuses. The material for ceramics includes crystalline composite oxide of group 2 element M and rare-earth element RE. The group 2 element M is one of Sr, Ca, or Ba, and a new first peak is observed between a peak of a (040) plane and a peak of a (320) plane of MRE_2O_4 in an X-ray diffraction (XRD) chart. The material for ceramics is produced by the following steps : preparing MRE_2O_4 as a raw spray material; and spraying the raw spray material to a predetermined target object.(AA) Intensity/Random unitsCOPYRIGHT KIPO 2017