The noble metal oxide thin film with high heat - and method for producing same

文件类型：PDF文档
文件大小：1904K
PROBLEM TO BE SOLVED : To provide a noble metal-oxide thin film material having high heat-resistance which can be used as an electronic conductor in a high-temperature environment of 1, 000°C or more.SOLUTION : A noble metal-oxide thin film material having high heat-resistance includes : a substrate consisting of sapphire, single crystal ZrO(with an addition of YO), or sintered ZrO(with an addition of YO); and a composite thin film which is formed on a surface of the substrate and includes fine particles containing oxides including a rare-earth element dispersed in a matrix consisting of a noble metal element. Furthermore, a coating film consisting of ZrO(with an addition of YO) may be formed on a surface of the composite thin film, preferably.