文件类型:PDF文档
文件大小:118K
PROBLEM TO BE SOLVED : To provide a material for spray coating capable of forming a spray coating film having excellent characteristics such as porosity and hardness, in addition to plasma erosion resistance.
SOLUTION : A material for spray coating contains an oxyhalogenated compound of a rare-earth element (RE-O-X) containing the rare-earth element (RE), oxygen (O), and a halogen element (X) as constituent elements. In an X-ray diffraction pattern of the material for spray coating, an intensity ratio [(IB+IC)/IA] of a sum of peak intensity IB of a main peak of an oxide of the rare-earth element and peak intensity IC of a main peak of a halide of the rare-earth element to peak intensity IA of a main peak of the oxyhalogenated compound of the rare-earth element is less than 0.02.
SELECTED DRAWING : Figure 1
COPYRIGHT : (C)2017, JPO&INPIT