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A sputtering target for a rare earth magnet and method of manufacturing same

2026-04-04 19:344720下载
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PROBLEM TO BE SOLVED : To provide a sintered compact target excellent in mass productivity and reproducibility, and useful for forming a rare earth magnet thin film having excellent magnetic properties, especially a neodymium magnet thin film, and to provide a production method thereof.SOLUTION : In a target for forming a rare earth magnet containing neodymium, iron and boron (or ferroboron) as essential components, the area ratio of a NdFeB phase is 61% or higher, the area ratio of an α-Fe phase is 8% or lower, and the residual part is constituted of a NdFeBphase (where, 11.9
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