POWDER FOR FILM FORMATION AND MATERIAL FOR FILM FORMATION

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This powder for film formation contains an oxyfluoride of a rare earth element (Ln-O-F). The average particle diameter (D50) of this powder is from 0.1 μm to 10 μm (inclusive), and the volume of pores having a diameter of 10 μm or less as determined by a mercury intrusion method is from 0.1 cm3/g to 0.5 cm3/g (inclusive). In an X-ray diffraction measurement of this powder using a Cu-Kα ray or a Cu-Kα1 ray, the ratio of the maximum peak intensity (S0) of an oxide of a rare earth element (LnxOy) as observed within the range of 2θ = 20-40° to the maximum peak intensity (S1) of the oxyfluoride of a rare earth element (Ln-O-F) as observed within the same range, namely S0/S1 is 1.0 or less.