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A manufacturing method of an optical element

2025-06-22 19:404080下载
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PROBLEM TO BE SOLVED : To compose an optical element of wider band of a material in which rare earth is added on host materials such as crystal of an oxide or silicate.SOLUTION : A rare earth-containing layer 105 consisting of a lamination structure of a first rare earth oxide layer 105a composed of an oxide of the first rare earth, a second rare earth oxide layer 105b composed of an oxide of the second rare earth different from the first rare earth, and a third rare earth oxide layer 105c composed of an oxide of the first rare earth is formed on a silicon layer 103 by physical vapor deposition, e.g., sputtering, and then heated at 950°C, for example.


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