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CORROSION RESISTANT MEMBER, ELECTROSTATIC CHUCK DEVICE AND METHOD FOR PRODUCING CORROSION RESISTANT

2025-06-21 11:081330下载
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PROBLEM TO BE SOLVED : To provide a corrosion resistant member that has excellent corrosion resistance against a halogen-based corrosive gas such as fluorine gas, chlorine gas and the like and plasma thereof, and when used as a mounting plate of an electrostatic device, has excellent adsorption of a tabular sample of a semiconductor wafer or the like, to provide a method for producing the corrosion resistant member and to provide an electrostatic chuck device having the corrosive resistant member. SOLUTION : The corrosion resistant member 17 includes a complex oxide produced by substituting a part of samarium in samarium aluminum perovskite with a rare earth element (RE) other than samarium and REAlO3 and is composed of a sintered body represented by formula (1) : SmxREyAlO3 (x+y=1, x>0, y>0; preferably, 0.5≤x<1, 0
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