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Compound, a polymeric compound, an acid generator, resist composition, resist pattern forming me

2025-06-18 11:543740下载
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PROBLEM TO BE SOLVED : To provide a new compound, a polymer compound and use methods thereof.SOLUTION : There is provided a compound of formula (1-1), where in the formula, Yand Yare each independently a single bond or a bivalent linking group; Rand Rare each independently a hydrocarbon group which may have a substituent or a group represented by formula (1-2), where at least either thereof is a group represented by formula (1-2); Vis an optionally substituted 1-4C fluorinated alkylene group; Mis an m-valent counter cation; and m is an integer of 1 to 3.


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