SUBSTRATE WITH COATING FILM, MANUFACTURING METHOD OF SUBSTRATE, AND MEMBER OF SEMICONDUCTOR MANUFA

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PROBLEM TO BE SOLVED : To provide a substrate with a coating film, the substrate having a flame-sprayed film on a substrate surface, the flame sprayed film being plasma-resistant, less likely to be peeled off, acid resistant, and having a high-surface resistance. SOLUTION : A substrate with a coating film including an oxyfluoride, a fluoride, and an oxide of a rare earth element (Ln), the film being obtained by flame-spraying a slurry onto a substrate surface, the slurry being obtained by dispersing a raw material powder including an oxyfluoride of the rare earth element (Ln) into an organic solvent. SELECTED DRAWING : Figure 1 COPYRIGHT : (C)2016, JPO&INPIT