Method for the preparation of rare earth element doped with different amounts of dopant with piezoel

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A method for producing a rare earth element doped piezoelectric material, having a first component, a second component and has the rare earth element. The method comprising the following : providing a substrate; initial flow of hydrogen over the substrate; after the initial flow of the hydrogen over the substrate, the first component to form the rare earth element doped piezoelectric material streams over a surface of a single target, wherein the target comprises the rare earth element in a particular atomic percent; and sputtering of the rare earth element doped piezoelectric material from the target to the substrate with.