METHOD FOR PRODUCING OXYNITRIDE

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PROBLEM TO BE SOLVED : To provide a method for manufacturing oxynitride having less adverse effect on human body while maintaining conventional detergency of oxynitride. SOLUTION : The present invention is the method for producing oxynitride having a mixing step of mixing raw materials, a calcination step of calcinating the raw materials after the mixing step thereby producing oxynitride and a cleaning step of cleaning the oxynitride after the calcination step with a cleaning fluid. In the method for producing oxynitride, the cleaning fluid in the cleaning step is a carbonic acid aqueous solution or a diluted hydrochloric acid solution with a concentration of 0.4 to 2.0% or the cleaning step is carbonic acid aeration in water. pH of the cleaning fluid generated in the cleaning step is preferably 4.0 to 10.0. SELECTED DRAWING : None COPYRIGHT : (C)2016, JPO&INPIT