分享好友 知识库首页 频道列表

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

2025-06-18 03:133920下载
文件类型:PDF文档
文件大小:1297K
A transistor device and the manufacturing methods are described. The device includes a gate structure having a gate layer and a ferroelectric layer, source and drain terminals, and a crystalline channel portion. The source and drain terminals are disposed at opposite sides of the gate structure. The crystalline channel portion extends between the source and drain terminals. The source and drain terminals are disposed on the crystalline channel portion and the gate structure is disposed on the crystalline channel portion. The crystalline channel portion includes a first material containing a Group III element and a Group V element, the gate layer includes a second material containing a Group III element and a rare-earth element, and the ferroelectric layer includes a third material containing a Group III element, a rare-earth element and a Group V element.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0