METHOD FOR WORKING GLASS MATERIAL AND DEVICE THEREFOR

文件类型：PDF文档
文件大小：664K
PROBLEM TO BE SOLVED : To provide a method for working a glass material where rare earths, polishing agents and abrasives are not used at all, solutions such as hydrogen fluoride which are difficult to handle and have an environmental load are not used at all, and various glass materials can be worked without introducing working modified layers, and to provide a device therefor. SOLUTION : Provided is a method for working a glass material where a glass material made of a solid oxide obtained by coupling one or more kinds of elements via oxygen is made into a workpiece 5 in the presence of water 1, water molecules are dissociated, a back bond of an oxygen element and the other element composing the workpiece 5 obtained by the dissociation of water molecules is cut and adsorption is caused, a catalyst substance assisting the production of a decomposition product by hydrolysis is used as a working standard face 3, the workpiece 5 and the working standard face 3 are arranged so as to be contacted or extremely approached, the electric potential of the working standard face 3 is made into a ranged free from the generation of H2 and O2, the workpiece 5 and the working standard face 3 are relatively operated, and the decomposed product is removed from the surface of the workpiece 5, and also provided is a device therefor. COPYRIGHT : (C)2016, JPO&INPIT