RARE-EARTH THIN-FILM MAGNET, PROCESS FOR PRODUCING SAME, AND TARGET FOR FORMING RARE-EARTH THIN-FI

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The present invention is a rare-earth thin-film magnet which comprises Nd, Fe, and B as essential components, characterized by comprising a structure in which an α-Fe phase and an Nd2Fe14B phase have been alternately arranged three-dimensionally, the phases each having an average crystal grain diameter of 10-30 nm. The rare-earth thin-film magnet is excellent in terms of mass productivity and reproducibility and has satisfactory magnetic properties. Also provided are a process for producing the rare-earth thin-film magnet and a target for use in producing the thin film.