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A thin-film piezoelectric element, the piezoelectric actuator, a piezoelectric sensor, a hard dis

2025-07-27 11:054510下载
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A thin film piezoelectric device according to the present invention includes a pair of electrode layers and a piezoelectric thin film interposed between the pair of electrode layers, wherein the piezoelectric thin film contains a rare gas element and has a content gradient of the rare gas element in the thickness direction of the piezoelectric thin film.


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