CORROSION RESISTANT MEMBER

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PROBLEM TO BE SOLVED : To provide a corrosion resistant member excellent in low dust emission properties and corrosion resistance. SOLUTION : Provided is a corrosion resistant member in which the corrosion resistant face at least exposed to a corrosive gas and its plasma includes SiO2 as the main component, and comprising Al2O3 and rare earth oxides and further comprising one or more kinds of oxides selected from the group 4 elements. COPYRIGHT : (C)2016, JPO&INPIT