A method of manufacturing a glass substrate

文件类型：PDF文档
文件大小：249K
PROBLEM TO BE SOLVED : To smoothly process an edge plane of a glass substrate and to unprecedentedly abbreviate the processing time.SOLUTION : At a grinding step of grinding an edge plane of a glass substrate, a grinding wheel equipped not only with a magnetic field formation unit including a rotational axle and a first component and a second component each constituted by a magnet, configured via a gap along the axial direction of the rotational axle, and rotated together with the rotational axle but also with a magnetic fluid constituted by abrasive magnet grains and a fluid and retained by a magnetic field formed between the first component and second component is used. At this grinding step, the concentration of the abrasive magnet grains within the magnetic fluid is adjusted at 70% or above, whereas, following the contact of the magnetic fluid and an edge plane of the glass substrate in a state where the rotational axle is being rotated, the grinding wheel and the to-be-ground glass substrate are relatively mobilized along the edge fringe of the glass substrate.