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The present invention relates to a manufacturing method of rare earth nitride, comprising the steps of manufacturing a rare earth precursor solution; manufacturing a sol type rare earth material by mixing the rare earth nitride solution with a polymerization initiator; manufacturing a gel type rare earth material by radiating microwaves to the sol type rare earth materials; manufacturing rare earth nitride by treating the gel type rare earth materials under nitrogen atmosphere with heat. In the present invention, rare earth nitride is manufactured through a sol-gel process by accelerating polymerization reaction of the sol type rare earth materials with use of microwave radiation.