基於稀土族氧化物的整体式腔室材料

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A solid sintered ceramic article may include a solid solution comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of approximately 0 molar % to approximately 30 molar %. Alternatively, the solid sintered ceramic article a solid solution comprising 40-100 mol% of Y2O3, 0-50 mol% of ZrO2, and 0-40 mol% of Al2O3.