分享好友 知识库首页 频道列表

GROUP 3 METAL PRECUSOR AND THIN FILM CONTAINING METAL

2025-06-18 05:085300下载
文件类型:PDF文档
文件大小:477K
The present invention provides a structure in which n cyclopentadienyl (Cp) ligand and m linear imine ligand (1≤ n ≤ 2, 1≤ m ≤ 2, n + m = 3) are coordinated to the central metal, characterized in that the central metal is a rare earth element or ruthenium (Lu) Group 3 metal precursor and thereby has the effect of providing a metal-containing thin film.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0