CORROSION-RESISTANT MEMBER, AND ELECTROSTATIC CHUCK DEVICE

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Provided is a corrosion-resistant member which has a low dielectric loss and a high permittivity and volume resistivity, and which exhibits excellent corrosion resistance against halogen-based corrosive gases such as fluorine-based corrosive gases and chlorine-based corrosive gases, and against the plasmas of said gases. Also provided is an electrostatic chuck device using the aforementioned corrosion-resistant member. Said corrosion-resistant member is formed from a composite oxide sintered body containing aluminum, samarium, and a rare-earth metal element excluding samarium, wherein the rare-earth metal element excluding samarium has an ionic radius of 0.88×10-10 m or greater.