分享好友 知识库首页 频道列表

New compounds and acid generator

2025-06-18 19:334510下载
文件类型:PDF文档
文件大小:1551K
PROBLEM TO BE SOLVED : To provide a novel compound useful as an acid generator for a resist composition, the acid generator comprising the compound, a resist composition containing the acid generator, and a method for forming a resist pattern using the resist composition.SOLUTION : A compound is shown by a general formula (b1-11). In the formula (b1-11), Rto Rare each independently an aryl group or an alkyl group, wherein any two of Rto Rmay bond with each other to form a ring along with a sulfur atom in the formula, and at least one of Rto Ris a substituted aryl group having a group shown by a general formula (I) as a substituent; and Xis an anion. In the formula (I), Ris a hydrogen atom of or C1 to C30 organic group which may have a substituent, Qis a divalent linkage group including an ester bond, a thioester bond, or an ether bond.


请登录查看


反对 0
举报 0
收藏 0
打赏 0
评论 0