NOBLE METAL-OXIDE THIN FILM MATERIAL HAVING HIGH HEAT-RESISTANCE

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PROBLEM TO BE SOLVED : To provide a noble metal-oxide thin film material having high heat-resistance which can be used as an electronic conductor in a high-temperature environment of 1, 000°C or more. SOLUTION : A noble metal-oxide thin film material having high heat-resistance includes : a substrate consisting of sapphire, single crystal ZrO2(with an addition of Y2O3), or sintered ZrO2(with an addition of Y2O3); and a composite thin film which is formed on a surface of the substrate and includes fine particles containing oxides including a rare-earth element dispersed in a matrix consisting of a noble metal element. Furthermore, a coating film consisting of ZrO2 (with an addition of Y2O3) may be formed on a surface of the composite thin film, preferably. COPYRIGHT : (C)2015, JPO&INPIT