TEMPERATURE PROCESSING DEVICE FOR CORROSIVE GAS AND TEMPERATURE PROCESSING METHOD

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PROBLEM TO BE SOLVED : To eliminate defects of a prior art. SOLUTION : In a temperature processing device for corrosive gas, at least four heating elements or a group of heating elements consisting of a conductive material are arranged in a chamber. The heating elements or the group of heating elements are connected to sub-systems of an electric energy net, which are individually closed loop and/or open-loop controllable, and can be heated by direct passage of electric current. The heating elements which are individually closed loop and/or open-loop controllable or the group of heating elements which are individually closed loop and/or open-loop controllable are closed loop and/or open-loop controllable for the same values or different values of at least one of parameters from a group consisting of process quantities of the heating elements affected by temperature, heating power, electric current, resistance, or the device. At least four sub-systems which are closed loop and/or open-loop controllable are galvanically isolated from the earth. COPYRIGHT : (C)2015, JPO&INPIT