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The present invention provides a method for manufacturing a substrate containing sprayed rare earth oxide with a thickness of 5 mm or less, wherein rare earth oxide is sprayed on the substrate in a thickness of 5 mm or less and a sprayed film is peeled off from the substrate. According to the present invention, a rare earth-containing oxide ceramic thin film can be easily manufactured by spraying rare earth oxide on a substrate of predetermined dimensions without molding, firing, and sintering processes. Moreover, it is possible to easily manufacture thin films in various shapes like a polygonal shape, a disc shape, a ring shape, a triangular shape, and the like by the selection of a substrate shape. In addition, it is possible to easily manufacture a thin film with a plurality of holes by spraying rare earth oxide on a substrate with a plurality of holes.COPYRIGHT KIPO 2015