High Flexible and Transparent Electrode based Oxide

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An oxide based highly flexible transparent electrode according to the present invention has a highly flexible characteristic which can be applied to a highly flexible display device, which is a next generation display, and concurrently has excellent electrical and optical characteristics. The transparent electrode is manufactured by a first step of preparing a flexible substrate made of glass or polymer; a second step of fixating the substrate at a rotator arranged within a chamber to be rotatable, generating a vacuum by a high vacuum pump, a low vacuum pump and a vacuum pump, and adjusting the density of plasma and adjusting an indium content in overall thickness and materials of a ZITO : Ga or ZITO : Al thin film to form (deposit) the ZITO : Ga or ZITO : Al thin film by applying RF power to each of a first sputter gun equipped with a ZnO target doped with group 3 elements (Ga, Al) and a second sputter gun equipped with an ITO target; and a third step of performing heat treatment for the substrate that has passed the second step, at 200-300° C for 50-70 seconds. The present invention provides the oxide based highly flexible transparent electrode by optimizing process conditions when manufacturing a multi-component metal oxide based transparent electrode made of ZnO-ITO doped with the 3 group elements, to have excellent electrical characteristics and high light transmittance as well as high flexibility and to reduce usage of indium which is a main material of the ITO and a rare earth metal.COPYRIGHT KIPO 2014