RECOVERY METHOD OF In-Ga-Zn OXIDE FROM IGZO SINTERED COMPACT

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PROBLEM TO BE SOLVED : To provide a technique to recover a composite oxide of In, Ga, and Zn, which is a raw material of a sputtering target of an IGZO sintered compact, from scrap of the sputtering target with a simple method, and thereby to provide a technique to effectively reuse a rare metal resource. SOLUTION : In a recovery method of a composite oxide of In, Ga, and Zn, a sintered compact of an oxide containing indium (In), gallium (Ga), and zinc (Zn) is leached with an acid, subsequently the leachate is neutralized by an alkali solution so as to form a composite hydroxide of In, Ga, and Zn, and after drying the composite hydroxide is roasted so as to obtain the composite oxide of In, Ga, and Zn. COPYRIGHT : (C)2015, JPO&INPIT