Corrosion-resistant member and method of manufacturing the same

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PROBLEM TO BE SOLVED : To provide a corrosion-resistant member which is used in halogen-based corrosive gasses such as a fluorine-based corrosive gas and a chlorine-based corrosive gas and in the plasma of these gasses and has the dielectric constant and strength enough to use as an electrostatic chuck. SOLUTION : The corrosion-resistant member has a sintered compact of a compound oxide including aluminum, yttrium and a rare-earth element except for yttrium. The sintered compact has the ratio [NRE/(NY+NRE)] being the ratio of the number of atoms (NRE) of the rare-earth element except for the yttrium to the sum (NY+NRE) of the number of atoms (NY) of the yttrium and the number of atoms (NRE) of the rare earth element except for the yttrium of ≥0.05 and COPYRIGHT : (C)2011, JPO&INPIT