MEASURING APPARATUS OF SOLID SAMPLE BY DISCHARGE EMISSION SPECTROSCOPIC ANALYSIS

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PROBLEM TO BE SOLVED : To provide an analytical method of an organic or polymer solid sample by a discharge emission spectroscopic analysis, in which the etching rate is increased and the etching homogeneity is increased while the intensity of the luminance and/or the ionization yield (by mass analysis) is increased, and the SN ratio of a detected signal is improved. SOLUTION : A measurement method of a solid sample 3 including an organic material layer by a discharge emission spectroscopic analysis includes the steps of : disposing a sample in a discharge emission lamp 2; inputting, into the discharge emission lamp, an air-fuel mixture containing at least one noble gas and gas oxygen in a state in which the concentration of the gas oxygen is 1-10 mass% of the air-fuel mixture; generating discharge emission plasma by applying electric discharge of radio frequency type to an electrode of the discharge emission lamp; irradiating the organic material layer with the plasma; and measuring, by the spectroscopic analysis, at least one signal indicating the ion species and/or excited species of the plasma. COPYRIGHT : (C)2014, JPO&INPIT