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POWDER COATING FOR ETCH CHAMBER

2025-07-26 20:353230下载
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A powder of melted particles, more than 95% by number of the particles exhibiting a circularity of greater than or equal to 0.85. The powder including more than 99.8% of a rare earth metal oxide and/or of hafnium oxide and/or of an aluminum oxide, as percentage by mass based on the oxides. The powder has a median particle size D50 of less than 15 μm, a 90 percentile of the particle sizes, D90, of less than 30 μm, and a size dispersion index (D90−D10)/D10 of less than 2, and a relative density of greater than 90%. The Dn percentiles of the powder are the particle sizes corresponding to the percentages, by number, of n%, on the cumulative distribution curve of the size of the particles in the powder and the particle sizes are classified by increasing order.


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