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MAGNESIUM ALUMINUM OXYNITRIDE COMPONENT FOR USE IN A PLASMA PROCESSING CHAMBER

2025-06-17 23:542930下载
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A component for use in a plasma processing chamber system is provided. The component for use in a processing chamber system comprises a bulk component body comprising magnesium aluminum oxynitride and sintering aids. The sintering aids comprise at least one of yttria, yttrium aluminate, rare earth metal oxide, and rare earth metal aluminate.


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