The rare earth containing K3LuF6, vacuum and vacuum ultraviolet light-emitting element emitting ult

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PROBLEM TO BE SOLVED : To provide a fluoride which achieves high-intensity light emission in a vacuum ultraviolet region, and to provide a new vacuum ultraviolet light-emitting element which comprises the fluoride and can be suitably used for photolithography, cleaning of semiconductor and liquid crystal substrates, sterilization, a next-generation high-capacity optical disk, medical treatments (ophthalmic treatment and DNA break) and the like, and a vacuum ultraviolet light emitting scintillator which can be suitably used for a small radiation detector in which a diamond or AlGaN light receiving element with low background noise is incorporated as a substitute for the conventional photomultiplier tube. SOLUTION : K3LuF6contains a rare earth element other than Lu, particularly at least one selected from Nd, Er and Tm. The vacuum ultraviolet light-emitting element and the vacuum ultraviolet light-emitting scintillator use the compound. COPYRIGHT : (C)2011, JPO&INPIT