A polygonal-shaped body and the aluminum nitride single crystal using this method for manufacturing

文件类型：PDF文档
文件大小：263K
The present invention provides an aluminum nitride single crystal forming polygonal columns, the polygonal columns having the following properties [a] to [c] : [a] the content of a metal impurity is below the detection limit, [b] the average bottom area is from 5x10 3 to 2x10 5 μm 2 , and [c] the average height is 50 μm to 5 mm. The above aluminum nitride single crystal forming polygonal columns is preferably obtainable by sublimating an aluminum nitride starting material (A) containing 0.1 to 30% by mass of a rare earth oxide by heating the starting material at a temperature of not lower than 2000°C, depositing aluminum nitride on a hexagonal single crystal substrate and thereby growing aluminum nitride single crystal in the shape of polygonal columns.